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Authors: Shypylenko A., Pshyk A.V., Medjanik K., Peplińska B., Oyoshid K., Jurga S., Coy E. |
Title: Influence of ion implantation on the physical and mechanical properties of multifunctional coatings based on Ti-Si-N |
Source: International Conference on Nanomaterials: Application & Properties (NAP) |
Year : 2016 |
Abstract:
Current paper presents the results of investigating of multifunctional Ti-Si-N coatings. Ti-Si-N coatings have been deposited using CAVD method with the aim of studying their chemical, physical, structural and mechanical properties. Coatings of Ti-Si-N were modified by high-intensity ion implantation using copper ions with dose D = 2 x 10(17) ions/cm(2) and energy E = 60 keV. The results demonstrated that ion implantation has effect on grain size, hardness, and Young modulus of the Ti-Si-N coating.
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(Pobrane: 2018-04-04)
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